The report contains ten-year analysis with the following sections
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spts technologies | 269 |
applied microstructures | 25 |
spp process technology systems uk | 17 |
xactix | 15 |
picofluidics | 10 |
primaxx | 9 |
malvern instruments | 6 |
aviza technology | 4 |
spp process technology systems | 1 |
xactix | 4 |
applied microstructures | 3 |
aviza technology | 3 |
spts technologies | 45 |
picofluidics | 1 |
applied microstructures | 1 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
controlled vapor deposition of multilayered coatings adhered by an oxide layer | 21 | 2004 |
apparatus for chemically etching a workpiece | 14 | 2009 |
composite shielding | 12 | 2011 |
mass flow controller monitoring | 11 | 2011 |
method and apparatus for processing a semiconductor workpiece | 11 | 2012 |
etching apparatus and methods | 11 | 2011 |
method of plasma etching | 11 | 2012 |
method of depositing silicon dioxide films | 10 | 2012 |
method of etching | 10 | 2013 |
methods of depositing aluminium layers | 10 | 2011 |