The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
focusing leveling device | 15 | 2013 |
magnetic alignment system and alignment method therefor | 15 | 2013 |
silicon wafer pre-alignment device and method therefor | 14 | 2013 |
mask transmission device and transmission method | 13 | 2015 |
off-axis alignment system and alignment method | 13 | 2012 |
silicon wafer edge protection device with collision protection function | 12 | 2013 |
halbach array and magnetic suspension damper using same | 11 | 2013 |
projection objective lens system and microlithography system using the same | 11 | 2010 |
chip-bonding system and method | 11 | 2015 |
laser annealing apparatus and laser annealing method | 11 | 2012 |