The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
system and method for treating substrate | 13 | 2009 |
apparatus and method for manufacturing substrates | 12 | 2012 |
antenna structure and plasma generating device | 11 | 2011 |
unit for supplying treating liquid, and apparatus and method for treating substrate usin… 🛈 | 10 | 2008 |
apparatus and method for drying substrates | 10 | 2007 |
wafer spin chuck and an etcher using the same | 10 | 2007 |
apparatus and method for treating substrate | 10 | 2011 |
method and apparatus for generating a carbon nanotube | 9 | 2007 |
spin head, chuck pin used in the spin head, and method for treating a substrate with the… 🛈 | 9 | 2007 |
method of processing a substrate, spin unit for supplying processing materials to a subs… 🛈 | 9 | 2007 |