The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
vacuum treatment apparatus | 32 | 2009 |
all solid-state electrochemical double layer supercapacitor | 22 | 2009 |
vacuum treatment apparatus and a method for manufacturing | 20 | 2010 |
cutting tool | 20 | 2007 |
application of hipims to through silicon via metallization in three-dimensional wafer pa… 🛈 | 19 | 2007 |
arc suppression and pulsing in high power impulse magnetron sputtering (hipims) | 17 | 2006 |
workpiece comprising an alcr-containing hard material layer and production method | 17 | 2003 |
direct liquid deposition | 16 | 2011 |
apparatus and method for processing a substrate | 16 | 2009 |
apparatus and method for depositing a layer onto a substrate | 15 | 2010 |