The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
substrate inspection apparatus and mask inspection apparatus | 7 | 2011 |
substrate holding apparatus | 7 | 2007 |
defect correcting method and device | 6 | 2009 |
interferometer and phase shift amount measuring apparatus | 5 | 2014 |
radiation source apparatus and duv beam generation method | 5 | 2010 |
inspection device, and wave surface aberration correction method | 4 | 2014 |
chucking device and chucking method | 4 | 2013 |
defect classification method and inspection apparatus | 4 | 2013 |
phase-shift amount measurement system and method of measuring the same | 4 | 2013 |
laser light source device and inspection apparatus | 4 | 2014 |