The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
substrate treating apparatus | 28 | 2007 |
cluster tool architecture for processing a substrate | 27 | 2004 |
substrate processing apparatus and substrate processing method | 13 | 2012 |
developing apparatus | 12 | 2007 |
a substrate treating apparatus | 11 | 2007 |
substrate treating apparatus | 11 | 2007 |
substrate processing apparatus | 10 | 2011 |
substrate processing apparatus and substrate processing method | 9 | 2012 |
alignment device and substrate processing apparatus | 8 | 2013 |
substrate processing apparatus | 8 | 2007 |