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carl zeiss smt | 141 |
zeiss carl smt | 29 |
asml netherlands | 7 |
applied materials israel | 1 |
amsl netherlands | 1 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
catadioptric projection objective | 53 | 2004 |
polarization-modulating optical element | 45 | 2004 |
particle-optical systems and arrangements and particle-optical components for such syste… 🛈 | 42 | 2003 |
optical integrator for an illumination system of a microlithographic projection exposure… 🛈 | 36 | 2006 |
catadioptric projection objective with intermediate images | 30 | 2004 |
particle-optical component | 30 | 2005 |
projection exposure apparatus with optimized adjustment possibility | 30 | 2008 |
euv exposure apparatus | 26 | 2010 |
method and device for monitoring multiple mirror arrays in an illumination system of a m… 🛈 | 26 | 2007 |
catadioptric projection objective with pupil mirror, projection exposure apparatus and p… 🛈 | 22 | 2006 |