The report contains ten-year analysis with the following sections
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wonik ips company | 422 |
ips | 63 |
integrated process systems | 19 |
atto company | 14 |
doosan mecatec company | 4 |
wonik ip company | 1 |
yuanyi ips corporation | 1 |
ips | 13 |
integrated process systems | 6 |
doosan mecatec company | 2 |
atto company | 1 |
wonik ips company | 12 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
surface processing method of silicon substrate for solar cell, and manufacturing method … 🛈 | 14 | 2010 |
method of forming chalcogenide thin film | 9 | 2008 |
apparatus and method for treating a substrate | 9 | 2011 |
gas-discharging device and substrate-processing apparatus using same | 9 | 2009 |
gas injection apparatus and substrate processing apparatus using same | 9 | 2009 |
apparatus for manufacturing semiconductor | 9 | 2009 |
thin film vapor deposition method and thin film vapor deposition apparatus | 9 | 2011 |
substrate support apparatus and substrate process apparatus having the same | 8 | 2013 |
substrate processing apparatus and substrate processing method | 8 | 2014 |
subtrate processing device and substrate processing system equipped with the same | 8 | 2011 |