How many patents does
Suess Microtec Lithography have?
patents
439
families
59
granted
89
applications
350
US
90
KR
48
EP
45
JP
43
CN
39
WO
37
RoW
137
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The report contains ten-year analysis with the following sections
- patent filing analysis
- worldwide filing analysis
- patent family analysis
- application analysis
- granted analysis
- classification analysis
- citation analysis
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Suess Microtec Lithography
Top ten assignees appearing on patents
2009 - 2018
| suess microtec lithography | 300 |
| suss microtec | 35 |
| alion | 2 |
| suss microtec lithograph | 1 |
| suss microtee lithography | 1 |
2009
| suss microtec | 5 |
| suess microtec lithography | 2 |
2018
| suess microtec lithography | 58 |
Suess Microtec Lithography
The top ten patent families are
|
Title of patent family (most common patent title) |
Family members |
Filing year |
|---|---|---|
| improved apparatus for temporary wafer bonding and debonding | 22 | 2009 |
| apparatus and method for aligning and centering wafers | 19 | 2013 |
| apparatus, system, and method for handling aligned wafer pairs | 18 | 2015 |
| debonding temporarily bonded semiconductor wafers | 17 | 2011 |
| chuck, in particular for use in a mask aligner | 15 | 2013 |
| method for coating a substrate | 13 | 2015 |
| debonding equipment and methods for debonding temporary bonded wafers | 11 | 2009 |
| method and device for active wedge error compensation between two objects that can be po… 🛈 | 11 | 2010 |
| method and device for curing at least in part a photoresist applied to a substrate | 11 | 2015 |
| spacer displacement device for a wafer illumination unit and wafer illumination unit | 11 | 2015 |