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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
high-energy ion implanter | 17 | 2013 |
ion implantation apparatus and ion implantation method | 17 | 2012 |
compounds extracted from palm oil mill effluent for the treatment of cancer, composition… 🛈 | 11 | 2007 |
ion implantation apparatus and ion implantation method | 11 | 2011 |
manufacturing method of semiconductor device | 10 | 2009 |
ion implantation method and ion implantation apparatus | 10 | 2011 |
high energy ion implanter, beam current adjuster, and beam current adjustment method | 10 | 2013 |
ion implantation method and ion implantation apparatus | 9 | 2012 |
insulation structure and insulation method | 9 | 2013 |
ion implantation apparatus and method of cleaning ion implantation apparatus | 9 | 2013 |