The report contains ten-year analysis with the following sections
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rudolph technologies | 12 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
high speed autofocus system | 21 | 2011 |
system for directly measuring the depth of a high aspect ratio etched feature on a wafer | 14 | 2009 |
projection system with metrology | 12 | 2010 |
automated wafer defect inspection system and a process of performing such inspection | 10 | 1998 |
optical acoustic substrate assessment system and method | 9 | 2013 |
inspection device with vertically moveable assembly | 9 | 2010 |
apparatus for obtaining planarity measurements with respect to a probe card analysis sys… 🛈 | 8 | 2003 |
infrared inspection of bonded substrates | 8 | 2009 |
wafer edge inspection | 8 | 2008 |
position sensitive detection optimization | 8 | 2011 |