The report contains ten-year analysis with the following sections
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roth & rau | 225 |
otb solar | 25 |
meyer burger (germany) | 19 |
ctf solar | 9 |
otb group | 6 |
roth & rau muegge | 5 |
meyer burger (netherlands) | 4 |
roth & rau - microsystems | 3 |
innolas systems | 2 |
roth and rau | 2 |
roth & rau | 12 |
otb group | 3 |
otb solar | 2 |
roth and rau | 1 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
microwave plasma generating device and method for operating same | 15 | 2012 |
parallel plate reactor for uniform thin film deposition with reduced tool foot-print | 14 | 2010 |
transport table and method for the use thereof | 11 | 2008 |
treatment module | 11 | 2012 |
hetero-contact solar cell and method for the production thereof | 11 | 2012 |
plasma generation device | 11 | 2013 |
substrate treatment system | 11 | 2012 |
method and device for coating substrates | 11 | 2011 |
cascade source and a method for controlling the cascade source | 11 | 2003 |
gas separation | 10 | 2012 |