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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
methods and materials for removing metals in block copolymers | 18 | 2012 |
polyoxometalate and heteropolyoxometalate compositions and methods for their use | 18 | 2014 |
compositions of neutral layer for directed self assembly block copolymers and processes … 🛈 | 18 | 2011 |
fine resist pattern-forming composition and pattern forming method using same | 16 | 2013 |
low dielectric photoimageable compositions and electronic devices made therefrom | 16 | 2012 |
substrate processing method, substrate processing apparatus, method for manufacturing se… 🛈 | 15 | 2013 |
perhydropolysilazane, composition containing same, and method for forming silica film us… 🛈 | 15 | 2013 |
composition containing polysilazane compound, which can provide dense siliceous film | 15 | 2007 |
positive working photosensitive material | 15 | 2012 |
method for forming of siliceous film and siliceous film formed using same | 15 | 2012 |