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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
method for producing siliceous film and polysilazane coating treatment liquid used there… 🛈 | 17 | 2009 |
composition for forming low-refractive-index film, method of forming low-refractive-inde… 🛈 | 16 | 2011 |
positive-working photoimageable bottom antireflective coating | 15 | 2004 |
upper surface antireflective film forming composition and pattern forming method using s… 🛈 | 15 | 2011 |
composition containing polysilazane compound, which can provide dense siliceous film | 15 | 2007 |
method for formation of siliceous film and siliceous film formed by the method | 14 | 2008 |
liquid etchant and method for forming trench isolation structure using same | 14 | 2009 |
method for forming isolation structure | 14 | 2010 |
lithography rinsing fluid and pattern formation method using same | 14 | 2011 |
composition for formation of top antireflective film, and pattern formation method using… 🛈 | 14 | 2007 |