The report contains ten-year analysis with the following sections
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nissin ion equipment company | 53 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
magnetic field sources for an ion source | 12 | 2013 |
ion beam irradiation device | 11 | 2012 |
ion beam line | 10 | 2013 |
ion source | 10 | 2013 |
ion implantation method and ion implantation apparatus | 9 | 2011 |
plasma generator | 8 | 2010 |
substrate processing device | 8 | 2014 |
ion beam irradiation apparatus, and ion beam current homogenization method | 8 | 2014 |
ion implantation method and apparatus | 8 | 2008 |
ion implantation method and apparatus | 8 | 2008 |