The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
multi-axis integrated mems inertial sensing device on single packaged chip | 15 | 2013 |
methods and structures of integrated mems-cmos devices | 12 | 2012 |
integrated inertial sensing device | 9 | 2013 |
method and structure of monolithically integrated ic-mems oscillator using ic foundry-co… 🛈 | 8 | 2008 |
mems structure with improved shielding and method | 7 | 2012 |
mems-based proximity sensor device and method | 6 | 2013 |
method and structure of sensors and mems devices using vertical mounting with interconne… 🛈 | 6 | 2009 |
system on a chip using integrated mems and cmos devices | 6 | 2009 |
power saving method of operating a portable computing device | 5 | 2014 |
method to package multiple mems sensors and actuators at different gases and cavity pres… 🛈 | 5 | 2012 |