The report contains ten-year analysis with the following sections
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mattson technology | 276 |
mattson technology canada | 23 |
mattson tech | 17 |
montecito research | 13 |
mattson thermal products | 10 |
vortek industries | 1 |
mattson technology | 42 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
motion simulation chair | 15 | 2007 |
advanced multi-workpiece processing chamber | 14 | 2007 |
system and method for protection of vacuum seals in plasma processing systems | 12 | 2013 |
electrostatic chuck system and process for radially tuning the temperature profile acros… 🛈 | 12 | 2009 |
methods for determining wafer temperature | 11 | 2006 |
apparatus and methods for generating electromagnetic radiation | 11 | 2012 |
novel mask removal process strategy for vertical nand device | 10 | 2013 |
method for forming microlenses | 9 | 2012 |
high efficiency plasma source | 9 | 2011 |
system and process for calibrating pyrometers in thermal processing chambers | 9 | 2002 |