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mapper lithography ip | 1163 |
mapper litheography ip | 16 |
mapper lithopraphy ip | 1 |
mapper lighography ip | 1 |
mapper lithography ip b.v., null | 1 |
mapper lithography ip | 40 |
mapper lithography ip | 83 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
multi-electrode electron optics | 60 | 2013 |
data path for lithography apparatus | 55 | 2010 |
capacitive sensing system with differential pairs | 54 | 2009 |
charged particle lithography apparatus and method of generating vacuum in a vacuum chamb… 🛈 | 52 | 2009 |
lithography system with differential interferometer module | 38 | 2011 |
charged particle multi-beamlet lithography system, modulation device, and method of manu… 🛈 | 35 | 2009 |
projection lens arrangement | 34 | 2008 |
cathode arrangement, electron gun, and lithography system comprising such electron gun | 32 | 2013 |
lithography system for processing a target, such as a wafer, a method for operating a li… 🛈 | 32 | 2011 |
charged particle lithography system and beam generator | 32 | 2012 |