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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
metal organic chemical vapor deposition apparatus and method | 10 | 2009 |
metal organic chemical vapor deposition device and temperature control method therefor | 10 | 2009 |
temperature control method for chemical vapor deposition apparatus | 9 | 2009 |
substrate processing method | 9 | 2009 |
temperature control method of chemical vapor deposition device | 8 | 2009 |
chemical vapor deposition device and temperature control method of chemical vapor deposi… 🛈 | 8 | 2009 |
gas injection unit for chemical vapor desposition apparatus | 7 | 2009 |
substrate attaching method | 7 | 2011 |
chemical vapor deposition apparatus capable of controlling discharging fluid flow path i… 🛈 | 6 | 2009 |
attaching module, apparatus for attaching substrate and method for manufacturing attachi… 🛈 | 5 | 2011 |