The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
substrate treatment apparatus | 13 | 2008 |
substrate processing device and substrate processing method | 12 | 2012 |
solar cell and method of manufacturing the same | 11 | 2007 |
apparatus for treating substrate and method for treating substrate | 11 | 2012 |
electro-optic device and method for manufacturing the same | 10 | 2009 |
substrate processing apparatus and substrate processing method | 10 | 2011 |
substrate processing apparatus | 10 | 2008 |
electro-optic device and method for manufacturing same | 10 | 2010 |
apparatus and method for manufacturing of thin film type solar cell | 10 | 2010 |
method and apparatus for manufacturing semiconductor device | 10 | 2008 |