The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
reticle pod | 12 | 2017 |
wafer container with purgeable supporting module | 10 | 2008 |
front opening unified pod with latch structure | 9 | 2011 |
large-sized front opening unified wafer pod | 9 | 2011 |
gasdiffusionsanlage für waferkassetten | 8 | 2014 |
reticle pod having gas guiding apparatus | 7 | 2013 |
method and system for cleaning photomasks | 7 | 2012 |
latch guide assembly | 6 | 2014 |
mask box having a buckling structure | 6 | 2012 |
operating methods of purge devices for containers | 6 | 2015 |