The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
surface damage layer cleaning process for crystal silicon rie texturing | 3 | 2010 |
positive dielectric film of sandwich structure suitable for rie (reactive ion etching) t… 🛈 | 3 | 2011 |
physical purification method and device of metallic silicon | 2 | 2011 |
system for recycling phosphorous sources in tubular diffusion process | 2 | 2010 |
surface treatment method for testing minority carrier lifetime of silicon wafer | 2 | 2011 |
progressively welded packaging module | 2 | 2010 |
polysilicon ingot casting method with low defect and high output and thermal field struc… 🛈 | 2 | 2011 |
method for diffusing high sheet resistance of solar cells | 2 | 2010 |
method for removing micro-damage layer from crystalline silicon surface after rie (react… 🛈 | 2 | 2011 |
solar cell reactive ion etching (rie) technology temperature compensation method | 2 | 2011 |