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carl zeiss microscopy | 1827 |
carl zeiss nts | 282 |
carl zeiss microimaging | 258 |
carl zeiss smt | 141 |
applied materials israel | 130 |
carl zeiss | 107 |
carl zeiss microlmaging | 53 |
alis corporation | 52 |
carl zeiss jena | 17 |
zeiss carl nts | 9 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
ion sources, systems and methods | 58 | 2005 |
particle-optical systems and arrangements and particle-optical components for such syste… 🛈 | 42 | 2003 |
particle-optical component | 30 | 2005 |
ion sources, systems and methods | 26 | 2003 |
particle-optical component | 25 | 2005 |
charged particle beam system and method of operating a charged particle beam system | 17 | 2013 |
particle-optical systems and arrangements and particle-optical components for such syste… 🛈 | 14 | 2010 |
charged particle beam device with an aperture unit and method for regulating a beam curr… 🛈 | 13 | 2009 |
particle beam microscope and method for operating the particle beam microscope. | 13 | 2010 |
method for producing a representation of an object by means of a particle beam, as well … 🛈 | 11 | 2009 |